NANO rental system  semi-automatic control
Nano small system with semi-automatic control: Cleaning, activating, etching, coating
semi-automatic control small system
Nano small system with fully automatic control, cleaning, activating, etching, coating

NANO rental system - available at short notice

The NANO small system, with its 24-litre chamber volume and semi-automatic control, is mainly used in the following areas:

  • Semiconductor technology
  • Precision technology
  • Electronics
  • Medical technology
  • Plastics
  • Elastomer technology
  • Research and development
  • Plastics


Technical data:

Switch cabinet:
W 580 mm, H 650 mm, D 600 mm

∅ 267 mm, L 420 mm

Chamber volume:
approx. 24 litres

Gas supply:
2 gas channels via needle valves

40 kHz/300 W, continuous
(optional: 13.56 MHz or 2.45 GHz)

Vacuum pump:
Leybold, type D8B ( 8 m3/h)

Parts holding:
1 piece product carrier:

semi-automatic, process time via timer