Low Cost System Zepto

Zepto plasma system for process development, cleaning, activation, etching
Zepto plasma system - needle valve for process development, cleaning, activation, etching in small batches
Zepto W6 plasma system

The 2.6-litre ZEPTO LOW COST PLASMA LABORATORY UNIT with manual, PC and PCCE control, is mainly used in the following areas:

  • Small batch production
  • Analytics (REM, TEM)
  • Medical technology
  • Sterilization
  • Research and Development departments
  • Archeology
  • Textiles
  • Plastics

Give us a call and we will be happy to advise you. Phone: +49 (0) 7458 - 999 31 - 0


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Basic equipment

  • The housing size varies depending on the components/options
  • Chamber volumes: 1.7 - 2.6 litres, depending on the version.
  • Power supply: 230 V

Gas supply

  • Needle valve
  • Mass Flow Controllers (MFCs)

Vacuum chambers

  • Quartz glass (UHP) round with lid
    (approx. ∅ 105 mm, L 200 mm or L 300 mm)
  • Borosilicate glass (UHP) round with lid
    (approx. ∅ 105 mm, L 200 mm or L 300 mm)


  • Product carrier: Aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass


  • Single, or multiple levels


  • Manual
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)

Pressure measurement

  • Pirani


  • Digital




40 kHz: Power 0 - 100 W

13.56 MHz: Power 0 - 50 W

Vacuum pumps

  • In different sizes and from various manufacturers (as required with activated carbon filter)

More options

Replacement part sets, pressure gauge, corrosive gas version, gas bottles, pressure reducer, Faraday Box, plasma polymerization accessories, test inks, oxygen generator, slow ventilation, slow evacuation, maintenance/service, documentation in language of the country, installation on site incl. training. Further options are available on request.

Plasma-Laboranlage Zepto