Low-pressure plasma system Tetra 30 PC/PCCE

Tetra 30 plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Tetra 30 plasma systems. Tetra 30 plasma systems are used primarily in the following areas:

  • Analytics (REM, TEM)
  • Archeology
  • Automotive
  • Biotechnology
  • Elastomer technology
  • Electronics
  • Electron microscopy
  • Precision technology
  • Research and development
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Micro-system technology
  • Solar technology
  • Textiles

Give us a call and we will be happy to advise you. Phone: +49 (0) 7458 - 999 31 - 0

Brochure TETRA 30

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Basic equipment

  • The housing size varies depending on the components/options
  • Chamber volumes: 34 - 57 litres, depending on the version
  • Power supply: 230 V or 400 V/3-phase

Gas supply

  • Mass Flow Controllers (MFCs)

Vacuum chamber

  • Stainless steel, rectangular, hinged door
    (approx. W 305 mm x D 370 mm or 625 mm)

Loading

  • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass

Electrodes

  • Single, or multiple levels
  • RIE electrodes with gas shower

Control

  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)

Pressure measurement

  • Pirani
  • Baratron (for corrosive gas version)

Timer

  • Digital

Generators

Frequencies: 40 kHz: Power 0 - 1000 W; 0 - 1500 W; 0 - 2500 W
13.56 MHz: Power 0 - 300 W; 0 - 600 W
2.45 GHz: Power 0 - 600 W; 0 - 1200 W

 

All generators are continuously adjustable from 0 - 100%

Vacuum pumps

  • In different sizes and from various manufacturers (as required with activated carbon filter)

More options

Replacement part sets, pressure gauge, corrosive gas version, gas bottles, pressure reducer, heating plate, temperature display, heatable chamber, Faraday Box, plasma polymerization accessories, test inks, oxygen generator, slow ventilation, slow evacuation, TEM sample holder flange, maintenance/service, documentation in language of the country, installation on site incl. training. Further options are available on request.