Special systems

Draht/Garn-Beschichtung/Reinigung/Aktivierung mit Plasma

Special plasma system Tetra 2 PC
The Tetra 2-PC Roll-to-Roll plasma system is designed for coating fibres, yarns and wire, using a roll-to-roll device.

Special plasma system Tetra 6 PC, roll-to-roll

Technical data:

Housing:
W 3491 mm, H 1000 mm, D 1278 mm

Chamber:
L 1050 mm, ∅ 90 mm

Chamber volume:
approx. 6 litres

Gas supply:
2 gas channels via MFCs

Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Automation:
Roll-to-Roll

Gefördert durch: Bundesministerium für Wirtschaft und Energie aufgrund eines Beschlusses des Deutschen Bundestages

The plasma system Tetra 15 is designed for sputtering (high vacuum-based coating technology), as well as for the purification processes in the preparation of highly pure surfaces.
The plasma system Tetra 15 is designed for sputtering (high vacuum-based coating technology), as well as for the purification processes in the preparation of highly pure surfaces.

Special plasma system Tetra 15 LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 1700 mm, D 800 mm

Chamber:
W 360 mm, H 150 mm, D 260 mm

Chamber volume:
approx. 15 litres

Gas supply:
2 gas channels via MFCs

Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Kurztaktanlage Tetra-30-LF-PC

A short-cycle system can be easily integrated into an existing production line. A fully automated short-cycle plant will also exclude the possibility of operator error.

Special plasma system Tetra 30-LF-PC

Technical data:

Switch cabinet:
W 800 mm, H 600 mm, D 500 mm

Chamber:
W 240 mm, H 150 mm, D 240 mm

Gas supply:
1 gas channel via MFCs

Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Automation:
The system can be integrated into a production line.

This system is also available as a kit.

The production system Tetra 100, with its 100-litre chamber volume, PC control and automatic doors, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 100-LF-PC

Technical data:

Switch cabinet:
W 2000 mm, H 2200 mm, D 2000 mm

Chamber:
W 700 mm, H 200 mm, D 700 mm

Chamber volume:
approx. 100 litres

Gas supply:
3 gas channels via MFCs

Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control:
PC control (Windows) with industrial field bus

Automation:
The system has a drawer door

Tetra-120-LF-PC

The production system Tetra 120, with its 120-litre chamber volume, PC control and automatic doors, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 120-LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 2150 mm, D 1000 mm

Chamber:
W 1200 mm, H 150 mm, D 700 mm

Chamber volume:
approx. 120 litres

Gas supply:
4 gas channels via MFCs

Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Automation:
The system has an automatic door

The production system Tetra 130, with its 130-litre chamber volume and PC-control, is used for the cleaning and coating of medical components.

Special plasma system Tetra 130-LF-PC

Technical data:

Switch cabinet:
W 1800 mm, H 2100 mm, D 1300 mm

Chamber:
W 400 mm, H 400 mm, D 810 mm

Chamber volume:
approx. 130 litres

Gas supply:
3 gas channels via MFCs
(of which 1x via Bubbler)
1 gas channel Monomer via 2/2-way valve

Generator:
1 piece (13.56 MHz)
(optional: 40 kHz)

Control
PC control (Windows) with industrial field bus

Properties:
UHV range with turbo pump

The production system Tetra 140, with its 140-litre chamber volume and PC control, is used in series production (cleaning, etching, activation and plasma polymerization).

Special plasma system Tetra 140-LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 2100 mm, D 650 mm

Chamber:
W 600 mm, H 400 mm, D 600 mm

Chamber volume:
approx. 140 litres

Gas supply:
3 gas channels via MFCs

Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

The production system Tetra 140, with its 140-litre chamber volume and PC control, is mainly used in series production (cleaning, etching, activation and plasma polymerization).

Special plasma system Tetra 140-LF-PC

Technical data:

Switch cabinet:
W 1000 mm, H 1800 mm, D 1000 mm

Chamber:
W 1000 mm, H 100 mm, D 1400 mm

Chamber volume:
approx. 140 litres

Gas supply:
2 gas channels via MFCs, liquid monomer dosing for plasma polymerization

Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

The production system Tetra 150, with its 150-litre chamber volume and PC control, is primarily used in textile coating.

Special plasma system Tetra 150-LF-PC

Technical data:

Switch cabinet:
W 1000 mm, H 2100 mm, D 1000 mm

Chamber:
W 400 mm, H 600 mm, D 625 mm

Chamber volume:
approx. 150 litres

Gas supply:
2 gas channels via MFCs

Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Automation:

Roll-to-roll with 400 mm width and 300 mm diameter

The production system Tetra 185, with its 185-litre chamber volume and PC control, is primarily used in printed circuit board production.

Special plasma system Tetra 185-LF-PC desmearing

Technical data:

Switch cabinet:
W 600 mm, H 2100 mm, D 1000 mm

Chamber:
W 400 mm, H 665 mm, D 700 mm

Chamber volume:
approx. 185 litres

Gas supply:
4 gas channels via MFCs

Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Properties:

  • Desmearing of various materials (bore hole wall cleaning)
  • Surface cleaning
  • Activation of metallic surfaces
  • 7 bays for 7 simultaneously treated plates
  • Production pre-cuts to 460 x 610 mm

Special plasma system Tetra-185-PCB - Desmearing

Technical specifications:

Switch cabinet:

W 600 mm, H 2100 mm, D 1000 mm

Chamber:

W 400 mm, H 665 mm, D 700 mm

Chamber volume:

approx. 185 liters

Gas supply:

4 gas channels via MFCs

Generator:

1 piece (80 kHz)

Control:

Full PC control

Characteristics:

Desmearing various materials (borehole wall cleaning)surface cleaningActivation of metallic surfaces7 slots for 7 plates to be treated at the same time, max. 460 x 610 mm or 14 circuit boards with dimensions max. 230 x 305 mm

The production system Tetra 210, with its 210-litre chamber volume and PC control, is used in series production (cleaning and coating).

Special plasma system Tetra 210-LF-PC

Technical data:

Switch cabinet:
W 1560 mm, H 2350 mm, D 1860 mm

Chamber:
W 600 mm, H 600 mm, D 600 mm

Chamber volume:
approx. 210 litres

Gas supply:
2 gas channels via MFCs

Generator:
1 piece pulse generator
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Special plasma system Tetra-216-LF-PC

Technical Data:

Switch cabinet:

W 600 mm, H 1700 mm, D 800 mm

Chamber:

W 600 mm, H 600 mm, D 620 mm

Chamber volume:

approx. 216 liters

Gas supply:

5 gas channels via MFCs

Generator:

1 piece (80 kHz each)

Control:

PC control (Windows) with industrial fieldbus

The production system Tetra 240, with its 240-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 240-LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 1700 mm, D 3200 mm

Chamber:
W 305 mm, H 300 mm, D 2600 mm

Chamber volume:
approx. 240 litres

Gas supply:
3 gas channels via MFCs

Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

The production system Tetra 260, with its 260-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 260-LF-PC

Technical data:

Switch cabinet:
W 2500 mm, H 2200 mm, D 1000 mm

Chamber:
W 650 mm, H 500 mm, D 800 mm

Chamber volume:
approx. 260 litres

Gas supply:
2 gas channels via MFCs

Generator:
10 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Special plasma system Tetra-330-LF-PC

Technical specifications:

Control cabinet:

W 1200 mm, H 1800 mm, D 1800 mm

Chamber:

W 530 mm, H 700 mm, D 900 mm

Chamber volume:

approx. 330 liters

Gas supply:

4 gas channels via MFCs

Generator:

1 piece (80 kHz each)

Control:

PC control (Windows) with industrial fieldbus

 

 

Tetra 375 role/role

Switch cabinet:  B 3150mm, H 2200mm, T 1800mm

Chamber:  B 1500mm, H 1000mm, T 290mm

Gas supply: 3 X Gas 1 X Ozon

Generator:  5000

Control: PC control

The role role system for two separate roles for independent machining.

The production system Tetra 375 with its 375-litre chamber volume and PC control is used in series production (cleaning, etching and activation).

Special plasma system Tetra 375-LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 2100 mm, D 800 mm

Chamber:
W 600 mm, H 360 mm, D 1900 mm

Chamber volume:
approx. 375 litres

Gas supply:
2 gas channels via MFCs

Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

The production system Tetra 400, with its 400-litre chamber volume, PC control and fully automatic sliding door, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 400-LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 2100 mm, D 650 mm

Chamber:
W 915 mm, H 750 mm, D 725 mm

Chamber volume:
approx. 400 litres

Gas supply:
3 gas channels via MFCs

Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Automation:
The system has an automatic sliding door

The production system Tetra 420, with its 420-litre chamber volume and PC control, is used in series production (cleaning, etching and activation). This system is used among other things for the desmearing of PCBs.

Special plasma system Tetra 420-LF-PC-PCB

Technical data:

Switch cabinet:
W 1600 mm, H 2100 mm, D 1200 mm

Chamber:
W 750 mm, H 800 mm, D 750 mm

Chamber volume:
approx. 420 litres

Gas supply:
4 gas channels via MFCs

Generator:
4 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

The special system Tetra 500, with its 500-litre chamber volume and PC control, is used in series production (cleaning, etching and activation of, for example, films).

Special plasma system Tetra 500-LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 2100 mm, D 800 mm

Chamber:
W 1500 mm, H 1700 mm, D 200 mm

Chamber volume:
approx. 500 litres

Gas supply:
3 gas channels via MFCs

Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Parts holding:
2 Roll-to-Roll systems

Control
PC control (Windows) with industrial field bus

Tetra-575-LF-PC

The special system Tetra 575, with its 575-litre chamber volume and PC control, is used in series production (cleaning, etching, activation and coating).

Special plasma system Tetra 575-LF-PC

Technical data:

Switch cabinet:
W 1150 mm, H 1900 mm, D 1600 mm

Chamber:
W 600 mm, H 1200 mm, D 800 mm

Chamber volume:
approx. 575 litres

Gas supply:
2 gas channels via MFCs

Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Parts holding:
22 tiers/product carriers (variable)

Control
PC control (Windows)

The production system Tetra 600, with its 600-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 600-LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 2200 mm, D 1200 mm

Chamber:
W 810 mm, H 810 mm, D 925 mm

Chamber volume:
approx. 600 litres

Gas supply:
2 gas channels via MFCs

Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

The production system Tetra 600 , with its 600-litre chamber volume and PC control, is used in series production (cleaning, etching and activation)

Special plasma system Tetra 600-LF-PC version 1

Technical data:

Switch cabinet:
W 600 mm, H 2200 mm, D 800 mm

Chamber:
W 1000 mm, H 1000 mm, D 600 mm

Chamber volume:
approx. 600 litres

Gas supply:
2 gas channels via MFCs

Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Automation:
11 tiers/product carriers

Control
PC control (Windows) with industrial field bus

The production system Tetra 600 LF-PC, with its 600-litre chamber volume and PC control, is mainly used in series production (cleaning, etching and activation):

The production system Tetra 600, with its 600-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 600-LF-PC version 2

Technical data:

Switch cabinet:
W 1800 mm, H 1800 mm, D 800 mm

Chamber:
W 580 mm, H 730 mm, D 1000 mm
Door with 2 x inspection glasses

Chamber volume:
approx. 600 litres

Gas supply:
2 gas channels via MFCs

Generator:
1 piece, automatic matching

Control
PC control (Windows) with industrial field bus

The production system Tetra 600, with its 600-litre chamber volume, PC control and a rotary drum, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 600-LF-PC with rotary drum version 1

Technical data:

Switch cabinet:
W 600 mm, H 2200 mm, D 800 mm

Chamber:
∅ 1100 mm, D 700 mm

Chamber volume:
approx. 600 litres

Gas supply:
2 gas channels via MFCs

Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Parts holding:
Rotary drum (with 4 baskets each with 30 litres volume)

Control
PC control (Windows) with industrial field bus

The production system Tetra-800, with it 600-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 800-LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 1800 mm, D 800 mm

Chamber:
W 1250 mm, H 550 mm, D 1120 mm

Chamber volume:
approx. 800 litres

Gas supply:
3 gas channels via MFCs

Generator:
1 piece (40 kHz)

Control
PC control (Windows) with industrial field bus

Production system Tetra 810
The production system Tetra-810 with its 810 liters chamber volume and PC-control is used to activate carbon fibers / composites for use.

Special plasma system Tetra 810-LF-PC

Technical data:

Switch cabinet:
W 1200 mm, H 2200 mm, D 2000 mm

Chamber:
W 900 mm, H 1100 mm, D 900 mm

Chamber volume:
approx. 810 litres

Gas supply:
2 gas channels via MFCs

Generator:
1 piece (80 kHz)

Control
PC control (Windows) with industrial field bus

The production system Tetra 850, with its 850-litre chamber volume and PC control, is used in series production (cleaning and activation).

Special plasma system Tetra 850-LF-PC

Technical data:

Switch cabinet:
W 1500 mm, H 2000 mm, D 800 mm

Chamber:
W 1300 mm, H 1800, D 400

Chamber volume:
approx. 850 litres

Gas supply:
2 gas channels via MFCs

Generator:
1 piece (40 kHz)

Control
PC control (Windows) with industrial field bus

The production system Tetra 1200, with its 1200-litre chamber volume and PC control, is used in series production (cleaning and activation).

Special plasma system Tetra 1200-LF-PC

Technical data:

Switch cabinet:
W 1000 mm, H 1000 mm, D 1800 mm

Chamber:
W 600, H 1000 mm, D 2000 mm

Chamber volume:
approx. 1200 litres

Gas supply:
2 gas channels via MFCs

Generator:
3 pieces (each 40 kHz)

Control
PC control (Windows) with industrial field bus

The production system Tetra 1600, with its 1600-litre chamber volume, is used for vacuum drying.

Special vacuum system Tetra 1600

Technical data:

Chamber:
W 900, H 700 mm, D 2600 mm

Chamber volume:
approx. 1600 litres

The production system Tetra 2000, with its 2000-litre chamber volume and PC control, is used in series production (cleaning and activation).

Special plasma system Tetra 2000-RF-PC

Technical data:

Chamber:
W 1000, H 2000 mm, D 1000 mm

Chamber volume:
approx. 2000 litres

Gas supply:
2 gas channels via MFCs

Generator:
1 piece (13.56 MHz)

Parts holding:
Up to 10 product carriers

Control
PC control (Windows) with industrial field bus

The production system Tetra 2400, with its 2400-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 2400-LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 2200 mm, D 800 mm

Chamber:
∅ 1100, D 2500 mm

Chamber volume:
approx. 2400 litres

Gas supply:
3 gas channels via MFCs

Generator:
4 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Parts holding:
Rotary drum (with 16 baskets each with 30 litres volume)

Control
PC control (Windows) with industrial field bus

Tetra-2800-LF-PC

Special plasma system Tetra 2800-LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 1700 mm, D 800 mm

Chamber:
∅ 1200 mm, D 2500 mm

Chamber volume:
approx. 2800 litres

Gas supply:
3 gas channels via MFCs

Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Special plasma system Tetra-3600

Technical specifications:

Switch cabinet / chamber:

L 450 mm, H 210 mm, W 170 mm

Chamber volume:

approx. 3600 liters

Gas supply:

2 gas channels via MFCs

Generator:

3 pieces (80 kHz) (5KW) Suaerstoffgenerator

Control:

Full PC control (Windows) - swivel arm

Drawer system:

pull-out goods rack

 

The production system Tetra 4400, with its 4400-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 4400-LF-PC

Technical data:

Switch cabinet:
W 1800 mm, H 1000 mm, D 800 mm

Chamber:
L 1350 mm, D 1250 mm, H 2600 mm

Chamber volume:
approx. 4400 litres

Gas supply:
3 gas channels via MFCs

Generator:
4 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Properties:
Oxygen generator
Plasma cleaning source for roots pumps

The production system Tetra 5600, with its 5600-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 5600-LF-PC

Technical data:

Switch cabinet:
W 1800 mm, H 2200 mm, D 1800 mm

Chamber:
W 2250 mm, H 2450 mm, D 1000 mm

Chamber volume:
approx. 5600 litres

Gas supply:
3 gas channels via MFCs

Generator:
6 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Parts holding:
loading via roll wagons
(optional: special drum)

Control
PC control (Windows) with industrial field bus

Special Plasma system Tetra-6000-AD-F

Technical Data:

Chamber: W 1000 mm, D 2600 mm, H 2300 mm

Can be inserted into the floor. Allows easy loading and unloading, as the system can be driven with a loading trolley (no forklift is required!).

Doors: can be opened and shot fully automatically via compressed air cylinder

Switch cabinet: W 3000 mm, H 2000 mm, D 1000 mm

Chamber volume: approx. 6000 litres

Gas supply: 2 gas channels via MFCs

Generator: 4 pieces (each 80 kHz)

Control: PC control (Windows) with industrial field bus

Sonder-Plasmaanlage Tetra-7000-LF-PC

The production system Tetra 7000, with its 7000-litre chamber volume and PC control, is used in series production (cleaning, etching, activation and coating).

Special plasma system Tetra 7000-LF-PC

Technical data:

Switch cabinet:
W 2400 mm, H 2300 mm, D 1000 mm

Chamber:
W 2400 mm, H 2100 mm, D 1400 mm

Chamber volume:
approx. 7000 litres

Gas supply:
3 gas channels via MFCs

Generator:
4 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

The production system Tetra 7300, with its 7300-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 7300-LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 2100 mm, D 1200 mm

Chamber:
W 1400 mm, H 2100 mm, D 2500 mm

Chamber volume:
approx. 7300 litres

Gas supply:
2 gas channels via MFCs

Generator:
3 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

The production system Tetra 7500, with its 7500-litre chamber volume and PC control, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 7500-LF-PC

Technical data:

Switch cabinet:
W 3000 mm, H 2000 mm, D 1000 mm

Chamber:
W 1500 mm, D 2000 mm, H 2500 mm

Chamber volume:
approx. 7500 litres

Gas supply:
2 gas channels via MFCs

Generator:
6 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Special plasma system Tetra 8000-LF-PC

Technical data:

Switch cabinet:
W 2000 mm, H 1800 mm, D 1000 mm

Chamber:
W 1700 mm, D 2800 mm, D 1700 mm

Chamber volume:
approx. 8000 litres

Gas supply:
2 gas channels via MFCs

Generator:
4 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

The production system Tetra 12600, with its 12,600-litre chamber volume and PC control, is used in series production (cleaning and activation).

Special plasma system Tetra 12 600-LF-PC

Technical data:

Switch cabinet:
W 1200 mm, H 2200 mm, D 800 mm

Chamber:
W 2400 mm, H 2100 mm, D 2500 mm

Chamber volume:
approx. 12,600 litres

Gas supply:
2 gas channels via MFCs

Generator:
6 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Parts holding:
Loading via roll wagons

Control
PC control (Windows) with industrial field bus