Inline plasma systems

special plasmasystems Tetra 30
A short-cycle system can be easily integrated into an existing production line. A fully automated short-cycle plant will also exclude the possibility of operator error.

Special plasma system Tetra 30-LF-PC

Technical data:

Switch cabinet:
W 800 mm, H 600 mm, D 500 mm

Chamber:
W 240 mm, H 150 mm, D 240 mm

Chamber volume:
approx. 30 litres

Gas supply:
1 gas channel via MFCs

Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Automation:
The system can be integrated into a production line.

This system is also available as a kit.

The production system Tetra 100
The production system Tetra 100, with its 100-litre chamber volume, PC control and automatic doors, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 100-LF-PC

Technical data:

Switch cabinet:
W 2000 mm, H 2200 mm, D 2000 mm

Chamber:
W 700 mm, H 200 mm, D 700 mm

Chamber volume:
approx. 100 litres

Gas supply:
3 gas channels via MFCs

Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Automation:
The system has a drawer door

production system
The production system Tetra 120, with its 120-litre chamber volume, PC control and automatic doors, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 120-LF-PC

Technical data:

Switch cabinet: W 600 mm, H 2150 mm, D 1000 mm

Chamber: W 1200 mm, H 150 mm, D 1700 mm

Chamber volume: approx. 120 litres

Gas supply: 4 gas channels via MFCs

Generator: 2 pieces (each 40 kHz)(optional: 13.56 MHz or 2.45 GHz)

Control PC control (Windows) with industrial field bus

Automation: The system has an automatic door

Special plasma system Tetra 210-LF-PC
The production system Tetra 210, with its 210-litre chamber volume and PC control, is used in series production (cleaning and coating).

Special plasma system Tetra 210-LF-PC

Technical data:

Switch cabinet:
W 1560 mm, H 2350 mm, D 1860 mm

Chamber:
W 1000 mm, H 200 mm, D 1400 mm

Chamber volume:
approx. 210 litres

Gas supply:
2 gas channels via MFCs

Generator:
1 piece pulse generator
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Special plasma system Tetra 400-LF-PC
The production system Tetra 400, with its 400-litre chamber volume, PC control and fully automatic sliding door, is used in series production (cleaning, etching and activation).

Special plasma system Tetra 400-LF-PC

Technical data:

Switch cabinet:
W 600 mm, H 2100 mm, D 650 mm

Chamber:
W 915 mm, H 750 mm, D 725 mm

Chamber volume:
approx. 400 litres

Gas supply:
3 gas channels via MFCs

Generator:
2 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Automation:
The system has an automatic sliding door