Femto low-pressure plasma system (plasma cleaner)

Bei diesem Bild handelt es sich um eine 360°-Aufnahme. Durch klicken und ziehen mit der Maus sowie benutzen der Steuerelemente lässt sich das Bild beliebig drehen und vergrößern. Aufgrund der hohen Datenmenge kann sich unter Umständen eine kleine Ladeverzögerung einstellen.

low pressure plasma femto
Femto plasma system for process development, Plasma cleaner, Plasma asher, Plasma etcher, Plasma activation, Femtoscience
Plasmacleaner femto
Femto plasma system with door hinges for process development, cleaning, activation, etching in small batches - Diener plasma systems
low- pressure plasma femto
Femto plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation
Plasmasystem femto
Femto plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation
low pressure plasmasystem femto
Femto plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation, Femtoscience
Plasmacleaner Femto
Femto plasma system for process development, cleaning, activation, etching in small batches - Diener plasma system
low pressure plasmasystem
Femto plasma system, plasma cleaner, plasma asher, plasma etcher, plasma activation

Femto plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Femto plasma systems. Femto plasma systems are used primarily in the following areas:

  • Analytics
  • Archeology
  • Automotive
  • Research and Development departments
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Micro-system technology
  • Sensors
  • Sterilization
  • Textiles

Give us a call and we will be happy to advise you. Phone: +49 (0) 7458 - 999 31 - 0

FEMTO brochure

Place an inquiry

Basic equipment

  • The housing size varies depending on the components/options
  • Chamber volumes: 1.9 - 6 litres, depending on the version
  • Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices

Gas supply

  • Needle valve
  • Mass Flow Controllers (MFCs)

Vacuum chambers

  • Stainless steel, round with lid
    (approx. ∅ 100 mm, L 278 mm or L 600 mm)
  • Stainless steel, rectangular, hinged door
    (approx. W 103 x D 285 x H 103)
  • Aluminium, round, with lid or hinged door
    (approx. ∅ 95 mm, L 280 mm or L 600 mm)
  • Quartz glass (UHP), round, with lid or hinged door
    (approx. ∅ 95 mm, L 280 mm or L 600 mm)
  • Borosilicate glass (UHP), round, with lid or hinged door
    (approx. ∅ 95 mm, L 280 mm or L 600 mm)

Loading

  • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass

Electrodes

  • Single, or multiple levels
  • RIE

Controls

  • Semi-automatic
  • PCCE control (Microsoft Windows CE)
  • PC control (Microsoft Windows POS Ready 2009)

Pressure measurement

  • Pirani
  • Baratron (for corrosive gas version)

Timer

  • Digital

Generators

Frequencies: 40 kHz: Power 0 - 100 W; 0 - 1000 W
13.56 MHz; Power 0 - 50 W; 0 - 300 W
12.45 GHz: Power 0 - 100 W; 0 - 300 W

 

All generators are continuously adjustable from 0 - 100%

Vacuum pumps

  • In different sizes and from various manufacturers (as required with activated carbon filter)

More options

Replacement part sets, pressure gauge, corrosive gas version, gas bottles, pressure reducer, heating plate, temperature display, heatable chamber, Faraday Box, plasma polymerization accessories, test inks, oxygen generator, slow ventilation, slow evacuation, TEM sample holder flange, maintenance/service, documentation in language of the country, installation on site incl. training. Further options are available on request.