Forschungsanlage Plasma System Bell Jar 35

Plasmaanlage Bell Jar
Bell Jar 35 in operation
Bell Jar 35 Plasmaanlage
Bell Jar 35 research system

The Bell Jar 35 plasma system is a research facility that has been developed for scientific experiments. The system is suitable for thermal evaporation, sputtering, electron beam evaporation, metallic coatings for SEM (Scanning Electron Microscope) sample preparation, as well as for classical plasma processes.

Give us a call and we will be happy to advise you. Phone: +49 (0) 7458 - 999 31 - 0

Basic equipment

  • Housing approx. W 560 mm x H 1640 mm x D 620 mm
  • Chamber volume: approx. 35 litres
  • Power supply: 230 V/16 A

Gas supply

  • 3 Mass Flow Controllers (MFCs)

Vacuum chambers

  • Glass Jar made of borosilicate glass
    ∅ 315 mm x H 500 mm

Sputter source

  • 1 sputter source 2" - 3" + shutter
    (with optional flue and gas inlet for reactive processes)

Substrate holder

  • ∅ 140 mm (optional rotatable substrate heating, substrate cooling)
  • Switchable as an electrode for plasma pretreatment (cleaning, activating, etching)

Control

  • PC control (Microsoft Windows XPe)

Pressure measurement

  • Pirani

Generators

Frequencies: 40 kHz: Power 0 - 500 W
13.56 MHz: Power 0 - 300 W

 

DC bias voltage source or unipolar pulsed

Power max. 300 W
Voltage max. 600 V DC

All generators are continuously adjustable from 0 - 100 %

Vacuum pumps

  • In different sizes and from various manufacturers (as required with activated carbon filter)

More options

Replacement part sets, pressure gauge, corrosive gas version, gas bottles, pressure reducer, heating plate, temperature display, heatable chamber, Faraday Box, plasma polymerization accessories, test inks, oxygen generator, slow ventilation, slow evacuation, TEM sample holder flange, maintenance/service, documentation in language of the country, installation on site incl. training. Further options are available on request.