Low Cost System Atto

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The 10.5-litre LOW COST ATTO PLASMA LABORATORY UNIT, with manual, PC and PCCE control, is mainly used in the following areas:

  • Small batch production
  • Analytics (REM, TEM)
  • Medical technology
  • Sterilization
  • Research and Development departments
  • Archeology
  • Textiles
  • Plastics

Give us a call and we will be happy to advise you. Phone: +49 (0) 7458 - 999 31 - 0

 

 

Plasma cleaner with manual control
Low-cost Atto plasma system with integrated PC control, Plasma cleaner, Plasma asher, Plasma etcher, Plasma etcher, Plasma activation for process development, Cleaning, Activation, Etching in small batches - plasma systems

Technical data: Atto plasma cleaner with manual control

Housing:
W 425 mm, H 275 mm, D 450 mm

Chamber:
made of glass, ∅ 211 mm, L 300 mm

Chamber volume:
approx. 10.5 litres

Gas supply:
2 gas channels via needle valves

Generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching

Vacuum pump:
Suction power: 2 m3/h

Parts holding:
1 piece product carrier:

Control:
Manual, process time via analogue timer

Plasma Cleaner with external PC control
Atto plasma system with external PC control, plasma cleaner, plasma asher, plasma etcher, plasma activation for process development, cleaning, activation, etching in small batches - plasma systems

Technical data: Atto Plasma Cleaner with external PC control

Housing: 
W 525 mm, H 275 mm, D 450 mm

Chamber:
made of glass, ∅ 211 mm, L 300 mm

Chamber volume:
approx. 10.5 litres

Gas supply:
2 gas channels via MFCs

Generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching

Vacuum pump:
Suction power: 2 m3/h

Parts holding:
1 piece product carrier:

Control
PC control (Microsoft Windows XP)

Plasma Cleaner with integrated PC control
Low-cost Atto plasma system with integrated PC control, Plasma cleaner, Plasma asher, Plasma etcher, Plasma etcher, Plasma activation for process development, Cleaning, Activation, Etching in small batches - plasma systems

Technical data: Atto Plasma Cleaner with integrated PC control

Housing:
W 525 mm, H 275 mm, D 450 mm

Chamber:
made of glass, ∅ 211 mm, L 300 mm

Chamber volume:
approx. 10.5 litres

Gas supply:
2 gas channels via MFCs

Generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching

Vacuum pump:
Suction power: 2 m3/h

Parts holding:
1 piece product carrier:

Control
PC control (Microsoft Windows XP)

Technical data: Atto Plasma Cleaner with integrated PCCE control

Housing:
W 525 mm, H 275 mm, D 450 mm

Chamber:
made of glass, ∅ 211 mm, L 300 mm

Chamber volume:
approx. 10.5 litres

Gas supply:
2 gas channels via MFCs

Generator:
40 kHz/200 W or 13.56 MHz/50 W fixed matching

Vacuum pump:
Suction power: 2 m3/h

Parts holding:
1 piece product carrier:

Control
PC control (Microsoft Windows CE)