Deposited materials:
parylene N, C, D, F-VT4
Range of thicknesses:
0.05 to 20 micrometers
Dimensions:
width: approx. 700 mm
depth: approx. 500 mm
height: approx. 700 mm
Pyrolysis:
1.6 kW / max. 750 °C
Chamber:
diameter: 200 mm
height: 200 mm
Carrousel:
diameter: 170 mm
height:170 mm
Cold trap:
Liquid N2
Pump system:
two-stage rotary vane
Pumping speed 16 m3/h
Ultimate pressure:
1 x 10-3 mbar
Control:
full PC control system,
software based on Windows
Connections:
230 V/16 A/50-60 Hz
(Compressed air: 6 bars oil free and dry )
Exhaust:
20 mm tube