Parylene P6

Parylene coating table top system
Parylene P6 table coating system

Deposited materials:    
parylene N, C, D, F-VT4

Range of thicknesses:    
0.05 to 20 micrometers

Dimensions:        
width: approx. 700 mm    
depth: approx. 500 mm                 
height: approx. 700 mm

Pyrolysis:        
1.6 kW / max. 750 °C  

Chamber:        
diameter: 200 mm      
height: 200 mm

Carrousel:        
diameter: 170 mm      
height:170 mm

Cold trap:        
Liquid N2

Pump system:   
two-stage rotary vane 

Pumping speed 16 m3/h

Ultimate pressure:    
1 x 10-3 mbar

Control:        
full PC control system,         
software based on Windows

Connections:       
230 V/16 A/50-60 Hz      
(Compressed air: 6 bars oil free and dry )                     

Exhaust:
20 mm tube     

 

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