Parylene P120D

Parylene coating system P120 D with rotary drum configuration (front view)

Deposited materials:      
parylene N, C, D, F-VT4

Range of thicknesses:          
0.05 to 50 micrometers

Dimensions:               
width: approx. 2200 mm
depth: approx. 2700 mm
height: approx. 1600 mm

Pryolysis:                        
4 kW / max 850°C

 

 

Parylene coating system P120 D
Parylene coating system P120 D with rotary drum configuration (side view)

Chamber:                       
diameter: 500 mm
length: 610 mm
Volume: approx. 120 litres

Rotary drum:
diameter: 445 mm
length: 580 mm
Volume: approx. 90 litres  

Cold trap:                       
Liquid N2

Pump system:

dry pump system
pumping speed 1800 m3/h

Ultimate pressure:
1 x 10-3 mbar

Control:
full PC control system, 
software based on Windows

Connections:
3 phases/400 V AC at 32 A/50-60 Hz
Compressed Air: 6 bars oil free and dry
Exhaust: 40 mm tube