Parylene P30

Parylene P30 coating system
Parylene P30 coating system

Parylene P30 

Deposited materials:    
parylene N, C, D, F-VT4

Range of thicknesses:    
0.05 to 50 micrometers

Dimensions:        
width: approx. 1400 mm    
depth: approx. 700 mm                 
height: approx. 1700 mm

Pyrolysis:        
2 kW / max. 700 °C  

Chamber:        
diameter: 310 mm      
height: 500 mm

Carrousel:        
diameter: 150 mm      
height: 270 mm

Cold trap:        
Liquid N2

Pump system:   
two-stage rotary vane 
pumping speed 25 m3/h

Ultimate pressure:    
1 x 10-3 mbar

Control:        
full PC control system         
software based on Windows

Connections:       
400 V/16 A/50-60 Hz      
Compressed air: 5-6 bars oil free and dry                    

Exhaust: 25 mm tube

Gefördert durch: Bundesministerium für Wirtschaft und Energie aufgrund eines Beschlusses des Deutschen Bundestages