Our plasma systems are available with the following options/accessories, which can be retrofitted in most cases:
Options and accessories for plasma systems
2.45 GHz generator (Microwave)
The power ranges from 0 to 850 watts, the generator has a PC interface. Main areas of application are activation, cleaning, etching, semiconductor (front-end), semiconductor (back-end), plasma polymerization.
13.56 MHz generator
In order to conform to DIN EN 55011, our 13.56 MHz generators are quartz-stabilized. The impedance matching is fixed, manual and automatic are possible. Main areas of application are activation, cleaning, etching, semiconductor (front-end), semiconductor (back-end), plasma polymerization.
40 kHz generator
Impedance matching is only possible in automatic mode, the power output comes in two versions. Main applications are activation, cleaning, etching, semiconductor (back-end), plasma polymerization.
2/2 way valve for liquid dosage
Valve for the targeted dosage of monomers.
Activated carbon filter
The activated carbon filter can be easily changed.
Suction filter for vacuum
Protects the vacuum pump from projected parts, coating and contamination.
A door that closes automatically at process start.
To track the batches.
The chamber can be heated to approx. 80 °C. The temperature can be regulated. It is for defined process conditions and higher etching rates.
Bias voltage measurement
The bias voltage measurement is a measurement device and is available for kHz and MHz generators.
The bubbler bottle belongs to polymerization accessories and is required for the connection of liquid monomers to the vacuum chamber. A carrier gas is employed instead of the simple monomer bottle. The carrier gas, e.g. Argon, is flushed through the monomer.
A butterfly valve is used for controlling a gas flow in vacuum technology, especially in the suction line of a vacuum pump. To this end, the flow resistance in the line is varied by adjusting a flap which can close the conduit to varying degrees.
Documentation in the national language
The documentation is created according to Machinery Directive 89/392/EEC. This does not apply for German and English languages. The documentation is not automatically included with the system and must be ordered separately.
Product carrier for use with bulk materials.
Pirani sensor or Baratron - display of the pressure in the vacuum chamber.
The pressure reducer is to be connected to the gas bottle - 200 bar. Different gases need different pressure reducers. So there is one for noble gases H2, O2, CF4, C4F8 and one for NH3.
To integrate a low-pressure plasma system in an automatic processing line.
Spare parts kit, standard or PFPE
The spare parts kit includes 1 clamping ring, 1 seal, 1 stainless steel flexible tube (vacuum tube), 1 window, 1 door seal, 10 pieces miniature fuses for the plasma system, as well as 1 litre of mineral oil for the vacuum pump with the standard kit, and 1 litre of PFPE oil for the vacuum pump with the PFPE kit.
Automatic printing of labels after the plasma treatment.
For tracking of batches.
Faraday box / cage
For electrically sensitive components. The components to be treated are in the Faraday box. These can be removed from the vacuum chamber.
Gas bottle holder
To be attached to the work table, to shelves or wall strips. The width is 70 mm. The strap secures without any room for play. It is suitable for all bottle sizes.
Gas detector (Dräger)
Additional safety option when using flammable gases in workplaces.
A detailed description of our different control variants can be found under the menu item Plasma systems/controls/semi-automatic control.
Parts to be treated are heated on the heating plate, which can heat up to max. 150 °C and is suitable for defined process conditions and higher etching rates. There are two options:
Equipped with temperature display device, a thermal sensor is installed so that the component surface temperature can be measured inside the vacuum chamber. Equipped with the temperature display integrated in the PC control, a thermal sensor is also mounted within the vacuum chamber which measures the component surface temperature . The temperature is shown on the screen.
Installation of your plasma system on site
This option includes the travel time, working time and travel costs of our service staff.
Corrosive gas implementation
Stainless steel valves, stainless steel pipework. Obligatory for plasma polymerization or the use corrosive gases such as NH3, H2O, CF4, SF6.
Customer-specific product carriers
Our systems are always supplied with a product carrier as standard. More or other versions for the optimal utilization of the plasma system can be supplied after consultation with Diener electronic.
Spray paint/glass plate set (PWIS-free test)
Accessories for carrying out paint-wetting fault tests. Scope of delivery: Spray paint in cans, 5 pieces each 400 ml. Glass plates 100 pieces, each 90 mm x 110 mm.
Slow ventilation of the vacuum chamber
The vacuum chamber is slowly vented via a filter. This prevents small components from swirling around in the chamber.
Slow evacuation of the vacuum chamber
Slow evacuation of the vacuum chamber using a by-pass valve. This prevents small components from swirling around in the chamber.
Longer vacuum chambers (Femto, Pico, Nano, ...)
Vacuum chambers are available in stainless steel, borosilicate glass or quartz glass. Chamber sealing can be a choice between lid and hinged door. The length of the vacuum chambers is dependent on your requirements for the plasma application. Consult us.
Display the output power of the generator. Analog display instrument.
The multiple-level electrode is available for round and/or rectangular vacuum chambers. Many parts can be treated at once. Areas of application are standard plasma processes. Please consult Diener electronic as to the exact construction of your individual electrode, as well as concerning other materials for the manufacture of the product carrier.
Microwave leak tester
Due to the dangerous radiation, it may be useful to install a microwave leak tester with microwave systems.
Polymerization accessories. For connection of liquid monomers to the vacuum chamber.
Allows you to connect the system to a computer.
OES Optical Emissions Spectrometer
Monitoring of the plasma process for quality assurance. Detection of the end point of the plasma process. OES only in conjunction with a PC-controlled system.
A detailed description of our different control variants can be found under the menu item Plasma systems/controls/PC control.
Based on Windows CE touch panel. A detailed description of our different control variants can be found under the menu item Plasma systems/controls/PCCE control.
Includes vaporizer bottle, a balance, dose pump, heating and possibly a mount.
Process gas bottle
Oxygen cylinder for connecting as a process gas in 2, 5 and 10-litre sizes, 2-litre hydrogen bottle and 5-litre argon bottle. Special transport terms are taken into account for the supply of gases. With rental systems the bottle must be purchased.
Quartz glass boat
Available in two sizes. For ultra high purity plasma processes or wafer treatment.
Achieves higher etch rates in round and rectangular stainless steel. Field of application is anisotropic and isotropic etching.
RIE electrode with gas shower
Rectangular stainless steel. Yields higher etch rates by homogeneous gas distribution. Area of application is anisotropic etching.
Roll to roll system
e.g. for the treatment of films/lead frames.
Oxygen is generated from the ambient air. Type Kröber O2. Oxygen output: 3-6 l/min.
For use with flammable gases such as hydrogen, acetylene, etc.
Special electrodes and product carrier
Please consult Diener electronic as to the exact construction of your individual electrode, as well as concerning other materials for the manufacture of the product carrier.
Special flanges/additional flanges
Special flanges are used when more than the prepared connections are required.
Special vacuum chambers
In accordance with DIN 12198, a UV-irradiance measurement was performed on our systems (inspection glass) . Result: safe. Special vacuum chambers are available in round versions with lid, rectangular and hinged door, they are made of aluminium and also differ in terms of the aperture diameter and the inner dimension. Consult us.
Standard electrode round or rectangular
Stainless steel/aluminium sheet for standard plasma processes.
TEM sample holder
Special setup for introducing from the outside into the plasma chamber. Any size can be realized. Please let us have the dimensions/drawings of your parts.
Temperature display device
Display device of the chamber temperature without heating plate. A thermal sensor is mounted within the vacuum chamber. The component surface temperature can thus be measured. The temperature indicator is also integrated in the PC control. Here the temperature is displayed on the screen.
Test ink set
Test inks for easy analysis of the surface tension. 28, 38, 56, 64, 72 and 105 mN/m are included in a set. Other values are available on request.
For substances with a low vapour pressure. Cup diameter: 16 mm, cup volume: 0.1 l. Shielding against plasma exposure, control of temperature (max. 500 °C) and the rate of temperature rise (up to 250 °C/min). Connection is via small flange lead through.
Vacuum chambers made of glass (borosilicate or quartz)
Vacuum chambers made of borosilicate glass are for high-purity plasma processes. Vacuum chambers made of quartz glass are for ultra-high purity plasma processes.
Vacuum chambers made of stainless steel
Vacuum chambers made of stainless steel are for standard plasma processes.
Vacuum pumping stations
Our pumps are available with mineral oil and PFPE oil. The pumps are supplied oil-filled.
Fully automatic control
A detailed description of our different control variants can be found under the menu item Plasma systems/ Controls/Fully automatic control.
Apparatus for the treatment of powder
Powder is treated in a rotating gas bottle. The bottle can be removed from the system for filling.
For the pre-cleaning of small parts in the washing machine. Dimensions: 500 mm x 300 mm. Minimum Quantity: 20 pieces.
Water-air cooling with casters for mobile application. Connection potential-free via 2 change-over contacts for pump protection circuit.
Maintenance offer for your plasma system
The Diener maintenance offer includes a complete service. Oil change, inspection of all connections, seals, plugs, etc., leak rate test, calibration of the pressure sensor and a function test. For more information about maintenance and service click on the menu item "Advice/Service".
For the initial cleaning of small parts before plasma treatment. Only necessary for heavily soiled parts. Manufacturer: Miele: Type WT 2670 WPM.
Water-cooled product carrier plate
The water-cooled plate is mounted on the chamber floor and is supplied with a water pump and water tank. It is used for the cooling of heat sensitive parts.
Other software functions
The software can always be extended by further options. Please let us know your requirements.
Additional gas channels
Needle valves: Our systems can be equipped with any number of needle valves. Standard in Femto type plasma systems are 1-3 pieces, more are available on request.
MFCs: Required in PC and PCCE controls. Our systems can be equipped with any number of mass flow controllers (MFCs).