Options and accessories for plasma systems

Our plasma systems are available with the following options/accessories, which can be retrofitted in most cases:

2.45 GHz generator (Microwave)

The power ranges from 0 to 850 watts, the generator has a PC interface. Main areas of application are activation, cleaning, etching, semiconductor (front-end), semiconductor (back-end), plasma polymerization.

13.56 MHz generator

In order to conform to DIN EN 55011, our 13.56 MHz generators are quartz-stabilized. The impedance matching is fixed, manual and automatic are possible. Main areas of application are activation, cleaning, etching, semiconductor (front-end), semiconductor (back-end), plasma polymerization.

13.56 MHz generator

40 kHz generator

Impedance matching is only possible in automatic mode, the power output comes in two versions. Main applications are activation, cleaning, etching, semiconductor (back-end), plasma polymerization.

40 kHz generator plasma system

2/2 way valve for liquid dosage

Valve for the targeted dosage of monomers.

Activated carbon filter

The activated carbon filter can be easily changed.

Activated carbon filter

Suction filter for vacuum

Protects the vacuum pump from projected parts, coating and contamination.

Automatic door

A door that closes automatically at process start.

Automatic door plasma cleaner Tetra 400

Barcode reader

To track the batches.

Heatable chamber

The chamber can be heated to approx. 80 °C. The temperature can be regulated. It is for defined process conditions and higher etching rates.

Bias voltage measurement

The bias voltage measurement is a measurement device and is available for kHz and MHz generators.

Bubbler bottle

The bubbler bottle belongs to polymerization accessories and is required for the connection of liquid monomers to the vacuum chamber. A carrier gas is employed instead of the simple monomer bottle. The carrier gas, e.g. Argon, is flushed through the monomer.

Bubbler bottle

Butterfly valve

A butterfly valve is used for controlling a gas flow in vacuum technology, especially in the suction line of a vacuum pump. To this end, the flow resistance in the line is varied by adjusting a flap which can close the conduit to varying degrees.

Documentation in the national language

The documentation is created according to Machinery Directive 89/392/EEC. This does not apply for German and English languages. The documentation is not automatically included with the system and must be ordered separately.

Rotary drum

Product carrier for use with bulk materials.

Pressure gauges

Pirani sensor or Baratron - display of the pressure in the vacuum chamber.

Pressure reducer

The pressure reducer is to be connected to the gas bottle - 200 bar. Different gases need different pressure reducers. So there is one for noble gases H2, O2, CF4, C4F8 and one for NH3.

Pressure reducer plasma system

Continuous systems

To integrate a low-pressure plasma system in an automatic processing line.

Spare parts kit, standard or PFPE

The spare parts kit includes 1 clamping ring, 1 seal, 1 stainless steel flexible tube (vacuum tube), 1 window, 1 door seal, 10 pieces miniature fuses for the plasma system, as well as 1 litre of mineral oil for the vacuum pump with the standard kit, and 1 litre of PFPE oil for the vacuum pump with the PFPE kit.

Label printer

Automatic printing of labels after the plasma treatment.

Label reader

For tracking of batches.

Faraday box / cage

For electrically sensitive components. The components to be treated are in the Faraday box. These can be removed from the vacuum chamber.

Faraday box / cage

Gas bottle holder

To be attached to the work table, to shelves or wall strips. The width is 70 mm. The strap secures without any room for play. It is suitable for all bottle sizes.

Gas detector (Dräger)

Additional safety option when using flammable gases in workplaces.

Semi-automatic control

A detailed description of our different control variants can be found under the menu item Plasma systems/controls/semi-automatic control.

Heating plates

Parts to be treated are heated on the heating plate, which can heat up to max. 150 °C and is suitable for defined process conditions and higher etching rates. There are two options:

Equipped with temperature display device, a thermal sensor is installed so that the component surface temperature can be measured inside the vacuum chamber. Equipped with the temperature display integrated in the PC control, a thermal sensor is also mounted within the vacuum chamber which measures the component surface temperature . The temperature is shown on the screen.

Heating plates Plasma system

Installation of your plasma system on site

This option includes the travel time, working time and travel costs of our service staff.

Corrosive gas implementation

Stainless steel valves, stainless steel pipework. Obligatory for plasma polymerization or the use corrosive gases such as NH3, H2O, CF4, SF6.

Customer-specific product carriers

Our systems are always supplied with a product carrier as standard. More or other versions for the optimal utilization of the plasma system can be supplied after consultation with Diener electronic.

Spray paint/glass plate set (PWIS-free test)

Accessories for carrying out paint-wetting fault tests. Scope of delivery: Spray paint in cans, 5 pieces each 400 ml. Glass plates 100 pieces, each 90 mm x 110 mm.

Slow ventilation of the vacuum chamber

The vacuum chamber is slowly vented via a filter. This prevents small components from swirling around in the chamber.

Slow evacuation of the vacuum chamber

Slow evacuation of the vacuum chamber using a by-pass valve. This prevents small components from swirling around in the chamber.

Longer vacuum chambers (Femto, Pico, Nano, ...)

Vacuum chambers are available in stainless steel, borosilicate glass or quartz glass. Chamber sealing can be a choice between lid and hinged door. The length of the vacuum chambers is dependent on your requirements for the plasma application. Consult us.

Power indicator

Display the output power of the generator. Analog display instrument.

Multiple-level electrode

The multiple-level electrode is available for round and/or rectangular vacuum chambers. Many parts can be treated at once. Areas of application are standard plasma processes. Please consult Diener electronic as to the exact construction of your individual electrode, as well as concerning other materials for the manufacture of the product carrier.

Multiple-level electrode plasma treatment

Microwave leak tester

Due to the dangerous radiation, it may be useful to install a microwave leak tester with microwave systems.

Monomer bottle

Polymerization accessories. For connection of liquid monomers to the vacuum chamber.

Polymerization accessories Plasma system

Network connection

Allows you to connect the system to a computer.

OES Optical Emissions Spectrometer

Monitoring of the plasma process for quality assurance. Detection of the end point of the plasma process. OES only in conjunction with a PC-controlled system.

PC control

A detailed description of our different control variants can be found under the menu item Plasma systems/controls/PC control.

Plasma systems/controls/PC control

PCCE control

Based on Windows CE touch panel. A detailed description of our different control variants can be found under the menu item Plasma systems/controls/PCCE control.

Polymerization accessories

Includes vaporizer bottle, a balance, dose pump, heating and possibly a mount.

Process gas bottle

Oxygen cylinder for connecting as a process gas in 2, 5 and 10-litre sizes, 2-litre hydrogen bottle and 5-litre argon bottle. Special transport terms are taken into account for the supply of gases. With rental systems the bottle must be purchased.

Quartz glass boat

Available in two sizes. For ultra high purity plasma processes or wafer treatment.

Quartz glass boat, wafer treatment

RIE electrode

Achieves higher etch rates in round and rectangular stainless steel. Field of application is anisotropic and isotropic etching.

RIE electrode with gas shower

Rectangular stainless steel. Yields higher etch rates by homogeneous gas distribution. Area of application is anisotropic etching.

RIE electrode with gas shower

Roll to roll system

e.g. for the treatment of films/lead frames.

Oxygen generator

Oxygen is generated from the ambient air. Type Kröber O2. Oxygen output: 3-6 l/min.

Safety valve

For use with flammable gases such as hydrogen, acetylene, etc.

Special electrodes and product carrier

Please consult Diener electronic as to the exact construction of your individual electrode, as well as concerning other materials for the manufacture of the product carrier.

Special flanges/additional flanges

Special flanges are used when more than the prepared connections are required.

Special vacuum chambers

In accordance with DIN 12198, a UV-irradiance measurement was performed on our systems (inspection glass) . Result: safe. Special vacuum chambers are available in round versions with lid, rectangular and hinged door, they are made of aluminium and also differ in terms of the aperture diameter and the inner dimension. Consult us.

Standard electrode round or rectangular

Stainless steel/aluminium sheet for standard plasma processes.

TEM sample holder

Special setup for introducing from the outside into the plasma chamber. Any size can be realized. Please let us have the dimensions/drawings of your parts.

TEM sample holder

Temperature display device

Display device of the chamber temperature without heating plate. A thermal sensor is mounted within the vacuum chamber. The component surface temperature can thus be measured. The temperature indicator is also integrated in the PC control. Here the temperature is displayed on the screen.

Temperature display device Plasma cleaner

Test ink set

Test inks for easy analysis of the surface tension. 28, 38, 56, 64, 72 and 105 mN/m are included in a set. Other values are available on request.

Test inks for easy analysis of the surface tension

Thermal evaporator

For substances with a low vapour pressure. Cup diameter: 16 mm, cup volume: 0.1 l. Shielding against plasma exposure, control of temperature (max. 500 °C) and the rate of temperature rise (up to 250 °C/min). Connection is via small flange lead through.

Vacuum chambers made of glass (borosilicate or quartz)

Vacuum chambers made of borosilicate glass are for high-purity plasma processes. Vacuum chambers made of quartz glass are for ultra-high purity plasma processes.

Vacuum chambers made of glass (borosilicate or quartz

Vacuum chambers made of stainless steel

Vacuum chambers made of stainless steel are for standard plasma processes.

Vacuum pumping stations

Our pumps are available with mineral oil and PFPE oil. The pumps are supplied oil-filled.

Fully automatic control

A detailed description of our different control variants can be found under the menu item Plasma systems/ Controls/Fully automatic control.

Apparatus for the treatment of powder

Powder is treated in a rotating gas bottle. The bottle can be removed from the system for filling.

Washing bag

For the pre-cleaning of small parts in the washing machine. Dimensions: 500 mm x 300 mm. Minimum Quantity: 20 pieces.

Water cooling

Water-air cooling with casters for mobile application. Connection potential-free via 2 change-over contacts for pump protection circuit.

Maintenance offer for your plasma system

The Diener maintenance offer includes a complete service. Oil change, inspection of all connections, seals, plugs, etc., leak rate test, calibration of the pressure sensor and a function test. For more information about maintenance and service click on the menu item "Advice/Service".

Washer dryer

For the initial cleaning of small parts before plasma treatment. Only necessary for heavily soiled parts. Manufacturer: Miele: Type WT 2670 WPM.

Water-cooled product carrier plate

The water-cooled plate is mounted on the chamber floor and is supplied with a water pump and water tank. It is used for the cooling of heat sensitive parts.

Other software functions

The software can always be extended by further options. Please let us know your requirements.

Additional gas channels

Needle valves: Our systems can be equipped with any number of needle valves. Standard in Femto type plasma systems are 1-3 pieces, more are available on request.

Additional MFCs

MFCs: Required in PC and PCCE controls. Our systems can be equipped with any number of mass flow controllers (MFCs).

Additional MFCs Plasmacleaner