Front view
Rear view
Power supply
RF Generator 100

RF Generators

Areas of application:

  • Low-pressure plasma
  • RF heating

RF Generator 13.56 MHz, 100 W

  • RF nominal output power: 100 watts
  • Frequency: 13.560 MHz ± 100 ppm
  • Adjustable RF output power: 0 - 100 watts, continuous
  • Generator can be pulsed: Min. on-time: 5µs
  • Impedance: 50 Ohms
  • RF stability: less than 5% (depending on the applied matching device)
  • Installed mismatch protection (from open-circuit to short-circuit)
  • Maximum mismatch without power reduction: VSWR = 1.2
  • RF switchable with full load
  • Mains supply 88 - 264 V AC/47 - 63 Hz (in connection with an external power supply)
  • Power consumption: max. 220 watts
  • Remote control connection for: - RF On/Off- RF performance settings (0...10 V = 0 ... 100 %)
  • RF output: N jack
  • Mains supply: external power supply module
  • Weight: approx. 6.5 kg (generator) plus 1.0 kg (mains adapter)

Please contact us for technical advice regarding this system.