Plasma cleaning sources from Diener electronic
The plasma cleaning source is an optional exhaust gas purification for dry running vacuum pumps such as roots or screw pumps.
For different plasma systems there are matching dry running vacuum pumps such as roots or screw pumps to perform the corresponding plasma process. In practice these pumps become contaminated during use with a plasma by fluid residues and so the vacuum pump has limited functionality.
The plasma cleaning source, developed and produced by Diener electronic, and patent-pending, offers protection for these vacuum pumps and cleans the hollow spaces.
The plasma cleaning source essentially consists of a process gas injection and removal from the hollow space and an electrode in, or on, the hollow space for generating plasma. Debris in the hollow spaces can be avoided or removed at any time. A longer life of the vacuum pump is therefore ensured.