The properties of parylene
Parylene are derivatives of benzene. The basic form of Parylene N consists of a benzene molecule. At the benzene ring, at two corners, each hydrogen atom is replaced by a CH2 group. The prefix "para" (abbreviated "p") indicates that these two CH2 groups are attached to the opposite corners of the benzene hexagon.
Parylene N is therefore a pure hydrocarbon.
But one or more hydrogen atoms can be replaced by halogen atoms at the Parylene molecule. Halogens are the chemical elements fluorine, chlorine, bromine and iodine. Thus, a variety of parylene derivatives can be formed theoretically. Only the types parylene N, parylene C, parylene D and parylene F-VT4 are of practical importance. In addition, there is the Parylene F-AF4.
It is possible to deposit all these parylene types in our systems, with the exception of parylene HT. This unique type should be only deposited by P260 which is equipped with a butterfly valve. This unique type should be only deposited by P260 which is equipped with a butterfly valve. The different parylene types posses quite similar characteristics. But if special requirements are needed, e.g. regarding high-temperature stability, electrical properties or barrier properties, so the Parylene type should be chosen with the most suitable profile of properties.