Parylene coating equipment
Parylene coating machines are basically vacuum systems. Thus, they include in each case a vacuum‑tight and pressure‑tight vacuum chamber and a vacuum pump. With approximately 0.02 -0.1 mbar, the working pressure is not particularly low. To obtain a good layer quality, it is desirable that foreign molecules are removed as far as possible. High quality seals, avoidence of out-gassing from components and a powerful vacuum pump, are necessary to reach good coating conditions.
Between the vacuum chamber and the vacuum pump a cold trap is installed, in order to polymerize the scraps of the parylene monomers, which are sucked out of the vacuum chamber. The polymerization of monomers inside the vacuum pump could cause a damage there.
Sheme of a parylene coating system with horizontal chamber