BETA Version

 

Parylene coating equipment

Parylene coating machines are basically vacuum systems. Thus, they include in each case a vacuum‑tight and pressure‑tight vacuum chamber and a vacuum pump. With approximately 0.02 -0.1 mbar, the working pressure is not particularly low. To obtain a good layer quality, it is desirable that foreign molecules are removed as far as possible. High quality seals, avoidence of out-gassing from components and a powerful vacuum pump, are necessary to reach good coating conditions.

Between the vacuum chamber and the vacuum pump a cold trap is installed, in order to polymerize the scraps of the parylene monomers, which are sucked out of the vacuum chamber. The polymerization of monomers inside the vacuum pump could cause a damage there.

Sheme of a parylene coating system with horizontal chamber

 

 

1) Vaporizer (resistance heating: Typical temperatures of 130 - 180 °C)

2) pyrolysis tube (resistance heating: Typical temperatures of 550 - 650 °C).

3) Vacuum chamber (base pressure of about 0.01 mbar; working pressure between 0.02 to 0.1 mbar.)

4) Carousel (rotating substrate carrier)

5) Chiller (z.B. Flüssigstickstoff: Temp. of about -196 °C)

6) Vacuum pump

7) PC control: setting and monitoring of the process parameters

 

 

Basic components of a Parylene conditioning

 

Dimer evaporationResistance heating max 200 ° C (typ. 130 ° C - 180 ° C)1
pyrolysis routeResistance heating max 700 ° C (typ. 600 ° C - 650 ° C)2
Gas Once Romansfor uniform monomer distribution3
vacuum chamberQuartz glass or stainless steel4
Fixturetypical turntable Floor support possible other support possible5
cold trap6
vacuum pumpRotary vane pump7
power supply
control

process cycle

 

setting parameters

 

monitoring sensors

PC control

 

 

optional components of a Parylene conditioning

 

Fixture

floor support

 

rotating drum

pressure sensorsPirani sensors

backing pump

heated in the treatment chamber

plasma generatorPlasma cleaning and plasma activation of the substrate

 

 

 

A parylene layer is forming on all cold surfaces in the vacuum chamber. Components, that should not be coated, have to be heated (especially sensors). Parylene, which is polymerized on the chamber walls, substrate carriers, in the cold trap, in lines, etc., is lost and have to be removed by mechanical cleaning. This is one of the reasons why parylene coatings are so expensive. The economic efficiency can be optimized, by putting so many coating goods as possible into the chamber. Therefore, Diener electronic offers a differentiated program of different plant sizes. This gives the user the ability to make optimal use of the chamber volume regarding its part geometry. Moreover, Diener electronic offers a variety of fixtures, which allow optimum utilization of the chamber volume.

For the Parylene P30, the vacuum chamber is a 30 liter bell made of borosilicate glass.
For the Parylene P30, the vacuum chamber is a 30 liter bell made of borosilicate glass.
Dimer evaporatoration chamber of the Parylene P260 system. It is loaded with the powdered dimer.
Dimer evaporatoration chamber of the Parylene P260 system. It is loaded with the powdered dimer.
Process control on the large touch screen monitor. All process parameters can be entered here and all sensor values are displayed. Process logs are saved and can be accessed in several representations.
Process control on the large touch screen monitor. All process parameters can be entered here and all sensor values are displayed. Process logs are saved and can be accessed in several representations.
Cold-trap and vacuum pump
Cold-trap and vacuum pump