Vacuum pump

The most convenient Vacuum pump applied in vacuum technology as well as in Plasma technology is the oil lubricated rotatry vane pump. Best vacuum pressures which can be achieved with this system are about 10-3 mbar. If a High vacuum or a Ultra high vacuum shall be achieved ultra high vacuum pumps such as a turbomolecular vacuum pump are applied and a rotary vane pump is used to generate a pre-vacuum.

Rotary valve pump
A Rotary vane pump can reach a vacuum pressure of 10-3 mbar.