Ultra High Purity (UHP)

Abbrevation UHP. This designation is frequently applied for the glas recipients of Diener electronic plasma systems. The recipients, if not from stainless steel, are made from UHP quartz glas or boron silicate glass. The Option UHP is available for Femto, Pico and Nano Plasma systems. Glas recipients are used in particularly if microwave plasma (13,56 MHz) is used to generate the Plasma and if ultra high puridity surfaces are required. Normal stainless steel or aluminium chambers as well as all components inside the recipient such as electrodes can sputter in case of some plasma processes. Components inside a UHP plasma system usually are coated by Al2O3.

quartz glas
The recipient of the Plasma system Bell Jar is made from UHP quartz glas.