Rotary Vane Pump

The most important type of vacuum pumps used in Low Pressure Plasma Technology. Rotary Vane Pumps can produce a vacuum of minimum 10-3 mbar what is sufficient for almost any plasma process.

In case a ultra-high vacuum shall be achieved usually a two step vacuum is generated where rotary vane pumps are used to achieve the high vacuum level.

Vacuum Pump
If the vacuum pressure needs not to be below 10-3 mbar usually Rotary Vane Pumps are used.