Quartz glas

Quartz glas is a high-puridity glas consisting from nothing else but SiO2.

In some cases stainless steel is not sufficiently resistant against plasma processes. In such cases the material of the plasma chamber is quartz glass which is almost completely resistant against most plasma processes.

In addition all screens and windows of a recipient are from quartz glass as well as the tracks to carry substrates in case of some special etching processes. Silicon wafers are positioned into quartz glass boots for plasma etching.

As quartz glas opposite to stainless steel is transparent to high-frequency electric fields, quartz glas plasma chambers are used for microwave plasma generation by magnetrons.

quartz glas
The recipient of the Bell Jar plasma chamber consists form high-puridity quartz glas.