Fluorine process gases, in particular Tetrafluormethane CF4, used for precursor forms radicals under plasma conditions which easily tend to polymerize. PTFE polymers resulting condense on a substrate surface.
The surfaces resulting are hydrophobe and lipophobe. They have extremely low coefficient of friction in contact to most materials and very low abrasion. PTFE coating is a methode for epilam coating surfaces which need to be treated by liquid lubrication. The epilam coat prevents lubricants from dissolving.