Plasma polymerisation

Coating technology where organic molecules of a process gas are polymerized by plasma reactions and depoisted on a substrate. The polymerisation process is initiated by transforming the monomers into radicals. Therefore also saturated monomere-molecules can be polymerized. Plasma polymerisation usually results in a lower linearity of polymers and a more cross-linked structure compared to polymers which are generated chemically in a liquid stadium.

The following surface effects can be achieved by plasma polymerisation:

  • PTFE- or PTFE-like thin layers
  • hydrophobic coating by polymerisation of the Process gas monomere HMDSO
  • hydrophobic coating by plasmapolymerisation of the process gas vinylacetat
  • Epilamisation by polymerisation of fluorine monomere Methan (CF4)
  • Plasme enhanced chemical vapour deposition (PACVD, PECVD)
  • Barrier layers to avoid diffusion and permeation
  • esthetic decoration of surfaces


The optional Plasmapolymerisation Kit enables plasma coating under atmospheric conditions.
Liquid precursors can be evaporated in Evaporation bottles and transformed into a process gas.