Producing structures in the dimensinal magnitude of 0,1 µm up to 1000 µm. Conventional mechanical treatment is no more applicable to produce these minimized structrures. Methods for working in these dimensions are fotolithography and plasma etching (RIE, DRIE).
Most important applications for micro technologies are:
- Micro electronics: Producing structures on semiconductors and circuit boards, particularly by fotolithgraphic processes.
- micro optics: Producing microoptical components like micro lenses, slits.
- micro mechanics: mechanical elements like micro gears, drives, axes.
- microfluidics: structures for chemical, biological and chemical analysis including channels, pumps and valves with dimensions of less than 1 mm (view ⇒Lab-on-Chip).
- Moulds for casting or microinjetion of micromechanical or microfluidic structures.
Often integration of several microtechnical structures in one technical unit is intended to avoid difficulties in mounting and connecting such elements in microscopic dimensions. The technology for integrating microsystems on one unit is designated micro systems technologiers.