Micro Systems Technology

Technology to produce Micro Systems: Mechanical Components designed in microscopic dimensions, often integrated  into units together with electronic or optical systems on the same substrate.

Examples: Microsensors, microheatings.

A prefered technology to execute micro systems is the LIGA technology.

Plasma technology can be applied for many processes in micro systems technology: Plasma Cleaning of surfaces prior to coating, Sputtering, Vapour Deposition, Bonding, Etching of foto resists, deep etching in semiconductors, protective coatings (hydrophobic, hydrophilic) of final layouts.