magazine

In a low pressure plasma a homogenous plasma can fill the complete recipient so that the whole volume can be used for plasma treatment. Therefore in series production of small components a multitude of components may be treated within one common process. An economic treatment procedure is using rotating drums or magazines.

A magazine is a multilayer rack where small components can be placed in desired position and orientation. This enables for optimized utilization of the chamber volume.

Magazines are commonly used for Plasma cleaning, Plasma etching and Plasma coating of microelectronic components like IC and leadframes.