Process for the generation of perfluorinated surfaces. Plastic parts can be fluorized with suitable process gases containing fluorine. Fluorine atoms are embedded into the surface of the polymer and convert the surface to a PTFE-like surface. This method is only suitable for plastic parts. Alternatively, very thin PTFE-like layers can be applied to metal or polymer surfaces employing fluorinated process gases. Usually, the aim of epilam coating is to keep oil from creeping away from desired lubricating points.