Barrel Plasma Etcher

Specifically equipped low pressure Plasma system for high efficient anisotropic Plasma etching. Usually a Barrel Reactor is used in combination with a RF Plasma Generator. Barrel Plasma Etchers are used for example when Foto Resist Ashing is the main application.

For details also see ⇒ Barrel Reactor

Barrel Plasma Etcher
In a Barrel Reactor one of the electrodes has a cylindric design.