Special and inline systems/fully automated systems

Low-pressure plasma systems (PlasmaCleaner)

The design of our plasma systems is individually tailored to your needs. The determining factors are the intended material throughput, the size of the parts to be treated etc. A short-cycle system can be easily integrated into an existing production line. Another benefit: With a fully automated short-cycle system, the possibility of operator errors is excluded.

See a small selection of our existing special/inline systems

Tetra 120 LF-PC

| Inline system

Technical data:

  • Control cabinet: W 600 mm, H 2150 mm, D 1000 mm
  • Chamber: W 1200 mm, H 150 mm, D 700 mm
  • Chamber volume: approx. 120 litres
  • Gas supply: 4 gas channels via MFCs
  • Generators: 2 pc. (40 kHz each) (optional: 13.56 MHz or 2.45 GHz)
  • Control: PC control (Windows) with industrial field bus
  • Automation: The system has an automatic door

Tetra 185 PCB Desmearing

| special system

Technical data:

  • Control cabinet: W 600 mm, H 2100 mm, D 1000 mm
  • Chamber: W 400 mm, H 665 mm, D 700 mm
  • Chamber volume: approx. 185 litres
  • Gas supply: 4 gas channels via MFCs
  • Generator: 1 pc. (80 kHz)
  • Controls: Full PC control

Features:

  • Desmearing of various materials (bore hole wall cleaning)
  • Surface cleaning
  • Activation of metal surfaces
  • 7 slots for simultaneous treatment of 7 plates of max. 460 x 610 mm or 14 printed circuit boards of max. 230 x 305 mm

Tetra 210 LF-PC

| Inline system

Technical data:

  • Control cabinet: W 1560 mm, H 2350 mm, D 1860 mm
  • Chamber: W 6000 mm, H 600 mm, D 600 mm
  • Chamber volume: approx. 210 litres
  • Gas supply: 2 gas channels via MFCs
  • Generator: 1 pc. pulse generator 1 pc. (40 kHz) (optional: 13.56 MHz or 2.45 GHz)
  • Controls: PC control (Windows) with industrial field bus

Tetra 216 LF-PC

| special system

Technical data:

  • Control cabinet: W 600 mm, H 1700 mm, D 800 mm
  • Chamber: W 600 mm, H 600 mm, D 620 mm
  • Chamber volume: approx. 216 litres
  • Gas supply: 5 gas channels via MFCs
  • Generator: 1 pc. (80 kHz each)
  • Controls: PC control (Windows) with industrial field bus

Tetra 330 LF-PC

| Inline system

Technical data:

  • Control cabinet: W 1200 mm, H 1800 mm, D 1800 mm
  • Chamber: W 530 mm, H 700 mm, D 900 mm
  • Chamber volume: approx. 330 litres
  • Gas supply: 4 gas channels via MFCs
  • Generator: 1 pc. (80 kHz each)
  • Controls: PC control (Windows) with industrial field bus

Tetra 375 Roll/roll

| special system

Technical data

  • Housing with control cabinet: W 3150 mm, H 2200 mm, D 1800 mm
  • Chamber: W 1500mm, H 1000mm, D 250mm
  • Gas: 3 X gas 1 X ozone
  • Generator 5000
  • Control: Controlled via PC
  • Roll-roll system for independent treatment of two separate rolls
     

Tetra 575 LF-PC

| special system

Technical data:

  • Control cabinet: W 1150 mm, H 1900 mm, D 1600 mm
  • Chamber: W 600 mm, H 1200 mm, D 800 mm
  • Chamber volume: approx. 575 litres
  • Gas supply: 2 gas channels via MFCs
  • Generators: 1 pc. (40 kHz each) (optional: 13.56 MHz or 2.45 GHz)
  • Parts holding fixture: 22 tiers / product carriers (variable)
  • Control: PC control (Windows)

Tetra 400 LF-PC

| special system

Technical data:

  • Control cabinet: W 600 mm, H 2100 mm, D 650 mm
  • Chamber: W 915 mm, H 750 mm, D 725 mm
  • Chamber volume: approx. 400 litres
  • Gas supply: 3 gas channels via MFCs
  • Generator: 2 pc. (40 kHz each) (optional: 13.56 MHz or 2.45 GHz)
  • Controls: PC control (Windows) with industrial field bus
  • Automation: The system has an automatic sliding door

Tetra 830 AL-PC with 2 doors

| Inline system

Technical data:

  • Control cabinet: W 600 mm, H 1,700 mm, D 800 mm
  • Chamber: 900 mm, H 400 mm, D 2300 mm
  • Doors: 2 pieces (1x front, 1x rear)
  • Chamber volume: approx. 830 litres
  • Gas supply: 1 gas channels via MFCs
  • Generator: 1 pc. (80 kHz)
  • Controls: PC control (Windows) with industrial field bus
  • Automation: The system can be integrated into a production line.

Tetra 800 LF-PC

| special system

Technical data:

  • Control cabinet: W 600 mm, H 1800 mm, D 800 mm
  • Chamber: W 1250 mm, H 550 mm, D 1120 mm
  • Chamber volume: approx. 800 litres
  • Gas supply: 3 gas channels via MFCs
  • Generator: 1 pc. (40 kHz)
  • Controls: PC control (Windows) with industrial field bus

Tetra 810 LF-PC

| special system

Technical data:

  • Control cabinet: W 1200 mm, H 2200 mm, D 2000 mm
  • Chamber: W 900 mm, H 1100 mm, D 900 mm
  • Chamber volume: approx. 810 litres
  • Gas supply: 2 gas channels via MFCs
  • Generator: 1 pc. (80 kHz)
  • Controls: PC control (Windows) with industrial field bus

Tetra-1200-LF-PC 

| special system

Technical data:

  • Control cabinet: W 1000 mm, H 1000 mm, D 1800 mm
  • Chamber: W 600, H 1000 mm, D 2000 mm
  • Chamber volume: approx. 1200 litres
  • Gas supply: 2 gas channels via MFCs
  • Generator: 3 pc. (40 kHz each)
  • Controls: PC control (Windows) with industrial field bus

Tetra 2800-LF-PC

| special system

Technical data:

  • Control cabinet: W 600 mm, H 1700 mm, D 800 mm
  • Chamber: ∅ 1200 mm, D 2500 mm
  • Chamber volume: approx. 2800 litres
  • Gas supply: 3 gas channels via MFCs
  • Generator: 1 pc. (40 kHz) (optional: 13.56 MHz or 2.45 GHz)
  • Controls: PC control (Windows) with industrial field bus

Tetra 3600

| special system

Technical data:

  • Control cabinet/chamber: L 450 mm, H 210 mm, W 170 mm
  • Chamber volume: approx. 3600 litres
  • Gas supply: 2 gas channels via MFCs
  • Generator: 3 pc. (80 kHz) (5KW) oxygen generator
  • Controls: Full PC control (Windows) swivel arm 
  • Drawer system: Pull-out products carrier

Tetra 8000-LF-PC

| special system

Technical data:

  • Control cabinet: W 2000 mm, H 1800 mm, D 1000 mm
  • Chamber: W 1700 mm, D 2800 mm, H 1700 mm
  • Chamber volume: approx. 8000 litres
  • Gas supply: 2 gas channels via MFCs
  • Generator: 4 pc. (40 kHz each) (optional: 13.56 MHz or 2.45 GHz)
  • Controls: PC control (Windows) with industrial field bus

Bell Jar 35

| special system

The Bell Jar 35 plasma system is a research system developed for scientific experiments. The system can be used for thermal evaporation, sputtering, electron beam evaporation, metal coating for SEM (scanning electron microscope), sample preparation, as well as for conventional plasma processes.

 

 

Technical data:

  • Housing approx. W 560 mm x H 1640 mm x D 620 mm
  • Chamber volume: approx. 35 litres
  • Voltage supply: 230 V / 16 A
  • Gas supply: 3 Mass flow controllers (MFCs)
  • Vacuum chambers: Glass bell made of borosilicate glass ∅ 315 mm x H 500 mm
  • Sputter source: 1 sputter source 2" - 3" + shutter (optionally with flue and gas inlet for reactive processes)
  • Substrate holder: ∅ 140 mm (options: rotating, substrate heating and cooling), can be switched as an electrode for plasma pre-treatment (cleaning, activation, etching)
  • Controls: PC control (Microsoft Windows XPe)
  • Pressure measurement: Pirani
  • Vacuum pumps: In different sizes and from different manufacturers (if required with activated carbon filter)
  • Other options: Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, heater plate, temperature display, heatable chamber, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, TEM sample holder flange, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request

 

Frequencies of generators:

  • 40 kHz: power 0 - 500 W
  • 13.56 MHz: power 0 - 300 W
  • Bias voltage source DC, or pulsed singe-pole
  • Power max. 300 W, voltage max. 600 V DC
  • The generators are infinitely adjustable from 0 - 100 %

Tetra 30 LF-PC

| Inline system

Technical data:

  • Control cabinet: W 800 mm, H 600 mm, D 500 mm
  • Chamber: W 240 mm, H 150 mm, D 240 mm
  • Chamber volume: approx. 30 litres
  • Gas supply: 1 gas channels via MFCs
  • Generator: 1 pc. (40 kHz) (optional: 13.56 MHz or 2.45 GHz)
  • Controls: PC control (Windows) with industrial field bus
  • Automation: The system can be integrated into a production line.
  • This system is also available as a kit.

Tetra 100 LF-PC

| special system

Technical data:

  • Control cabinet: W 2000 mm, H 2200 mm, D 2000 mm
  • Chamber: W 700 mm, H 200 mm, D 700 mm
  • Chamber volume: approx. 100 litres
  • Gas supply: 3 gas channels via MFCs
  • Generator: 1 pc. (40 kHz) (optional: 13.56 MHz or 2.45 GHz)
  • Controls: PC control (Windows) with industrial field bus
  • Automation: The system has a drawer door.

+49 7458 99931-0

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